@misc{ghosh2026wafer,
  title = {Wafer-to-Wafer Bonding: Part {I}---The Coupled Physics Problem and the 2D Finite Element Implementation},
  author = {Ghosh, Kamalendu and Shrimali, Bhavesh and Jeong, Subin},
  year = {2026},
  eprint = {2603.22827},
  archivePrefix = {arXiv},
  primaryClass = {physics.comp-ph},
  doi = {10.48550/arXiv.2603.22827},
  url = {https://arxiv.org/abs/2603.22827}
}